Vacuum baffles and cold traps are important components of many vacuum systems for many reasons. First, a baffle can reduce the pumpdown time of a chamber by as much as 75%. Between 1x10-3 Torr to 1x10-8 Torr, the major residual gas in a vacuum chamber is water vapor. Baffles and cryo-coils can become cold very quickly, thus they can rapidly remove the water vapor from the system. |